| AVS 64th International Symposium & Exhibition | |
| Spectroscopic Ellipsometry Focus Topic | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| EL-TuP1 Ultra High-speed Spectroscopic Ellipsometry and its Applications Gai Chin, ULVAC, Japan |
| EL-TuP2 Comparing and Evaluating the Calculation Results of Measurement Uncertainty for Various Types of Rotating-element Spectroscopic Ellipsometers YongJai Cho, W. Chegal, H.M. Cho, Korea Research Institute of Standards and Science, Republic of Korea |
| EL-TuP3 Ellipsometry Analysis of a Germanium-on-insulator Wafer Rigo Carrasco, N. Samarasingha Archichchege, New Mexico State University, B.Y. Nguyen, Soitec, France, S. Zollner, New Mexico State University |