| AVS 64th International Symposium & Exhibition | |
| Plasma Science and Technology Division | Tuesday Sessions |
| Session PS-TuP |
| Session: | Plasma Science and Technology Poster Session |
| Presenter: | Bo-Jr Chen, National Tsing Hua University, Taiwan, Republic of China |
| Authors: | B.J. Chen, National Tsing Hua University, Taiwan, Republic of China Y.C. Wu, National Tsing Hua University, Taiwan, Republic of China J.S. Chiou, National Tsing Hua University, Taiwan, Republic of China K.C. Leou, National Tsing Hua University, Taiwan, Republic of China |
| Correspondent: | Click to Email |
Low temperature non-equilibrium plasma discharges are of great interests for applications ranging from micro/nano fabrication to bio/medical treatments. The density of the plasma discharge governs the basic characteristics of these plasma processes. In this study, microwave based diagnostics are developed for plasma density measurement or even process monitoring. The first device is a compact plasma absorption probe (C-PAP), a simple electric dipole like probe where the tip is formed by the center conductor of a coaxial semi-rigid cable, which is enclosed by a dielectric tube. The probe operated under the “resonant” mode, i.e., detecting the resonance frequency when the probing microwave and the nature frequency of the structure from by the probe and the surrounding plasma medium. The probe is designed by employing three dimensional electromagnetic numerical simulation analysis (HFSS, ANSYS Corp) where the plasma is treated as a dielectric with dielectric functions determined by plasma density, microwave frequency and collision frequency of electrons. The effects of plasma sheath and presheath are also investigated in the simulation analysis. The simulation results are used to calibrate the results from experimental measurements. The second resonant type probe under development is a spiral probe (SP) where the structure is a shorted microstrip transmission line. The first resonance of this structure occurs at the frequency where the transmission line becoming a half wavelength resonant structure. The spiral probe is designed for mounting on a chamber wall to minimize perturbation to the plasma discharges. Experimental and simulation results of the C-PAP, as well as the initial simulation analysis of the SP will be presented.
Acknowledgement
Work supported by the Ministry of Science and Technology, ROC (Taiwan).