AVS 64th International Symposium & Exhibition
    Plasma Science and Technology Division Tuesday Sessions
       Session PS-TuP

Paper PS-TuP32
Development of a Novel VI Sensor for RF Power Measurement

Tuesday, October 31, 2017, 6:30 pm, Room Central Hall

Session: Plasma Science and Technology Poster Session
Presenter: Kwang-Ki Kim, Chungnam National University, Republic of Korea
Authors: K.-K. Kim, Chungnam National University, Republic of Korea
S.J. You, Chungnam National University, Republic of Korea
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VI sensor plays an important role in dynamic impedance matching in RF power systems for various plasma fabrication processes. Therefore, many kinds of VI sensors have been developed for several years. However, these sensors have an issue of VI coupling that a transformer coil only for detecting current also detects voltage which is for detecting of a voltage sensor. In order to reduce the voltage in the coil, we used a novel double shielding walls that can shield the voltage from the coil effectively. We confirmed a voltage and current ratio in the coil using an electro-magnetic simulation by changing the walls' height, position and gap between the walls then analyzed to find VI coupling minimization condition. We developed highly well VI decoupled sensor that has a phase difference about 1.32 degrees between the voltage and current compare to the other sensor that has the phase difference above 20 degrees in a condition of ideally phase difference zero.