AVS 64th International Symposium & Exhibition
    Plasma Science and Technology Division Tuesday Sessions
       Session PS-TuP

Paper PS-TuP31
A New Transformer Model for Solenoidal ICP Discharge Expandable to Low Density Plasma

Tuesday, October 31, 2017, 6:30 pm, Room Central Hall

Session: Plasma Science and Technology Poster Session
Presenter: Jang-Jae Lee, Chungnam National University, Republic of Korea
Authors: J.-J. Lee, Chungnam National University, Republic of Korea
S.J. Kim, Chungnam National University, Republic of Korea
K.-K. Kim, Chungnam National University, Republic of Korea
Y.S. Lee, Chungnam National University, Republic of Korea
S.J. You, Chungnam National University, Republic of Korea
Correspondent: Click to Email
A transformer model is well known as model for the analysis of the physics of inductively coupled plasma source. However, this model can be applied only at high density region where the skin depth is much smaller than the chamber radius. In this study, a transformer model which can be applied even under long skin depth conditions was presented. The expression of fields in the plasma source is derived in a one-dimensional geometry and the circuit components of transformer model as a function of electron density can be obtained by the spatial integrating the fields. Comparing these results with those obtained from Maxwell’s equation, we confirmed that the results agree with each other in various conditions.