| AVS 64th International Symposium & Exhibition | |
| Plasma Science and Technology Division | Tuesday Sessions |
| Session PS-TuP |
| Session: | Plasma Science and Technology Poster Session |
| Presenter: | Anna Dzarasova, Quantemol LTD, UK |
| Authors: | C. Hill, Quantemol LTD, UK S. Rahimi, Quantemol LTD, UK D.B. Brown, Quantemol LTD, UK A. Dzarasova, Quantemol LTD, UK J.R. Hamilton, Quantemol LTD, UK S. Zand-Lashani, Quantemol LTD, UK J. Tennyson, University College London, UK |
| Correspondent: | Click to Email |
QDB (https://quantemoldb.com)[1] is a database of plasma reactions and chemistries which is being expanded to include surface interactions and processes occurring at interfaces. This database aims to become a basis for computational model development for plasma-assisted processes. Such processes have become more and more popular, and increasingly allow better control and achieve high precision[2]. A way to reduce development risks in plasma chamber design and process optimisation is modelling the plasma kinetics and better understanding plasma-surface interactions. This, in turn, requires an understanding of processes using atomic-scale physics and where scaling becomes non-linear.
The QDB web software provides a platform for users to download, upload, compare and validate data, and exposes an Application Programming Interface (API) for its automated retrieval in a range of formats suitable for use in modelling software. The software was used to deposit industrial plasma chemistries developed within Powerbase project to be accessed via the API using specifically. Experimental validation was provided by industrial partners of Powerbase project. The library of chemistries and examples and datasets has been further developed with both experimental and theoretical sources by Quantemol staff and by our community of users.
In this presentation we will describe recent Powerbase developments in QDB, with a focus on the increased provision of data relating to the interaction of particles with surfaces. This has required the expansion of the QDB data model to include a characterization of the surface (substrate) composition and structure as well as the description of the behaviour of individual adsorbed species (desorption energy, diffusion energy, etc.)
It is hoped that the database and its associated online web application software and API will prove useful to the AVS community, particularly in commercial and academic research areas related to modelling plasma-enhanced processes.
[1] J. Tennyson et al., Plasma Sources Sci. Technol. 26 (2017) 055014.
[2] H. B. Profijt et al., J. Vac. Sci. Technol. A 29 (2016) 050801.
Acknowledgment: this project has received funding from the Electronic Component Systems for European Leadership Joint Undertaking under grant agreement No 662133. This Joint Undertaking receives support from the European Union’s Horizon 2020 research and innovation programme and Austria, Belgium, Germany, Italy, Netherlands, Norway, Slovakia, Spain, United Kingdom.