| AVS 64th International Symposium & Exhibition | |
| Manufacturing Science and Technology Group | Wednesday Sessions |
| Session MS+AS-WeA |
| Session: | Advanced Surface, Interface, and Structural Characterization for High Volume Manufacturing |
| Presenter: | Arthur Woll, Cornell University |
| Correspondent: | Click to Email |
In early 2019, the Cornell High Energy Synchrotron Source (CHESS) will complete its most significant upgrade since its construction in 1980. CHESS was originally constructed as a dual-purpose machine, serving as both an x-ray source as well as a particle physics experiment. Since 2008, CHESS has operated as one of only five dedicated high energy synchrotron sources in the world, and one of only two in the U.S.. The upgrade will result in a dramatically improved source, will include six new undulator-fed experimental stations, and represents a unique opportunity to increase and improve access to hard x-ray synchrotron light.
CHESS’s history and mission emphasize the importance of deep collaboration with user communities to identify critical areas of instrumentation and methodological development. In particular CHESS has a long history of serving and advancing research on thin films and interfaces – in areas spanning both basic and applied research. CHESS currently hosts active user communities engaged in many of the most promising areas of thin-film research – including organic electronic thin films, high-K dielectrics and other complex oxides, dichalcogenides, and III-V nitrides. Particular research tools include ex-situ characterization such as grazing incidence small- and wide-angle scattering (GISAXS and GIWAXS), fast pole-figure analysis, automated x-ray reflectivity. Specialized equipment for in-situ measurements include chambers for in-situ thermal annealing and solvent annealing, and support for user-supplied UHV chambers for studying in situ thin-film growth and surface science. We will present several examples of recent user science as well as ongoing and proposed CHESS-based developments for thin-film research to motivate a discussion among the thin-film community of the most promising and critical areas for future capabilities of CHESS.