AVS 64th International Symposium & Exhibition | |
Spectroscopic Ellipsometry Focus Topic | Monday Sessions |
Session EL+AS+EM-MoA |
Session: | Spectroscopic Ellipsometry: Novel Applications and Theoretical Approaches |
Presenter: | Carola Emminger, New Mexico State University |
Authors: | C. Emminger, New Mexico State University N. Samarasingha, New Mexico State University F. Abadizaman, New Mexico State University N.S. Fernando, New Mexico State University S. Zollner, New Mexico State University |
Correspondent: | Click to Email |
Exploration of the optical properties of bulk germanium (Ge) is necessary for the advancement of Ge technology. In fact, many of the Ge applications depend on the dielectric function (ε), which is directly related to the electronic band structure. Here we investigate the effect of temperature on the optical properties and interband critical points (CPs), primarily the E0 and E0+Δ0 critical points of bulk Ge in the temperature range from 10 to 738 K using spectroscopic ellipsometry at 70° angle of incidence. The data was taken in two parts, in the near IR region and in the UV region, which provides data from 0.5 to 6.2 eV. The low temperature environment was created in a UHV cryostat with liquid helium and nitrogen as cryogens. To reduce the thickness of the native GeO2 layer, the Ge sample was cleaned using ultra-pure water, isopropanol, an ultrasonic bath and ozone cleaning. It was possible to reduce the oxide thickness to about 11 Å at room temperature.
The authors used a two-phase model (GeO2 layer/Ge substrate) and a parametric oscillator model with a set of adjustable parameters to extract the real and imaginary parts of the complex dielectric function of the bulk Ge for the whole temperature range. To investigate this temperature dependence of the CP parameters (threshold energy, broadening and phase angle) further, we also compared the second derivative d2ε/d2ω of the dielectric function with analytical line shapes.
The temperature has a significant influence on both the real and imaginary parts of the complex dielectric function of bulk Ge. This temperature dependent ε can be explained by a Bose-Einstein occupation factor. Due to the electron-phonon interaction, we find a temperature dependent red shift (shift to lower energies) of the E0 and E0+Δ0 critical point energies. The temperature independent spin orbit splitting Δ0 is found to be 286 meV. A similar effect has been seen in the E1, E1+Δ1, E0’, and E2 CP energies. These CPs are broadened and shifted to the lower energies with increasing temperature.