AVS 64th International Symposium & Exhibition
    2D Materials Focus Topic Wednesday Sessions
       Session 2D+EM+MN+NS-WeA

Paper 2D+EM+MN+NS-WeA1
Capacitance-voltage Characteristics of Graphene-gate MOS Devices: The Effect of Graphene Quantum Capacitance

Wednesday, November 1, 2017, 2:20 pm, Room 16

Session: 2D Device Physics and Applications
Presenter: Ruixue Lian, University of Florida
Authors: R. Lian, University of Florida
A. Ural, University of Florida
Correspondent: Click to Email

There has been significant research interest in graphene for electronics applications, due to its good electrical conductivity, high optical transparency, mechanical flexibility, and two-dimensional structure. However, the potential of graphene as a channel material replacing silicon is limited due to the absence of a bandgap. On the other hand, graphene is an excellent candidate as a transparent, conductive, and flexible electrode for electronic and optoelectronic devices.

Unlike conventional metals, whose Fermi level is typically pinned at the surface, the Fermi level and hence workfunction of graphene can be tailored by electrostatic gating, chemical doping, or surface engineering. As a result, graphene is also a promising candidate as the gate electrode in metal-oxide-semiconductor (MOS) devices, particularly when transparency or workfunction tunability is a requirement.

In real graphene sheets, charged impurities cause electron-hole puddles and random local electrostatic potential fluctuations (statistically described by a Gaussian distribution), which leads to a modified density of states (DOS). In this work, using this modified DOS, we numerically compute the quantum capacitance of graphene as a function of the graphene electrostatic potential at different temperatures and strengths of the potential energy fluctuations. We compare the exact results to various approximations made in the literature when fitting experimental data. We find that the largest discrepancy between the exact results and the approximations occurs near the Dirac point.

In capacitance-voltage (C-V) characterization of graphene-gate MOS devices, what is measured is not the quantum capacitance versus the graphene potential, but the total gate capacitance versus the gate voltage. We numerically compute the gate voltage as a function of the graphene potential and the resulting C-V characteristics at different temperatures, strengths of the potential energy fluctuations, and equivalent oxide thicknesses. We also consider the effect of series and parallel parasitic impedance to the overall shape of the C-V curves. Furthermore, we numerically compute the full C-V characteristics at different values of the equivalent oxide thickness, silicon doping density, and Dirac voltage of graphene. Finally, we fit our recent experimental C-V data with these theoretical calculations to extract the strength of the potential energy fluctuations and the parasitic impedances.

These results provide important insights into the effect of the graphene quantum capacitance on the C-V characteristics of MOS devices and the potential of graphene as a gate electrode in future MOS technology.