AVS 62nd International Symposium & Exhibition | |
Plasma Science and Technology | Thursday Sessions |
Session PS+2D-ThM |
Session: | Plasma Processing for 2D Materials |
Presenter: | Luc Stafford, Universite de Montreal, Canada |
Correspondent: | Click to Email |
Graphene films were exposed to the late afterglow of a reduced-pressure N2 plasma sustained by microwave electromagnetic fields. X-ray photoelectron spectroscopy (XPS) shows that plasma-generated N atoms are incorporated into both pyridinic and pyrrolic groups, without excessive reduction of sp2 bonding. Nitrogen incorporation was found to be preceded by N adsorption, where N adatom density increased linearly with treatment time while aromatic nitrogen saturated. This finding was confirmed by Raman spectra showing a linear increase of the D:G ratio attributed to constant surface flux of plasma generated species.
Combined Density Functional Theory calculations with a Nudged Elastic Band (DFT-NEB) approach indicate that incorporation reactions taking place at point vacancies in the graphene lattice requires an activation energy in the 2-6 eV range, but the energy required for the reverse reaction exceeds 8 eV. Stable nitrogen incorporation is therefore judged to be defect-localized and dependent on the energy transfer (6 eV) provided by N2(A)-to-N2(X) metastable-to-ground de-excitation reactions occurring at the late-afterglow-graphene interface.