| AVS 62nd International Symposium & Exhibition | |
| Electronic Materials and Processing | Monday Sessions |
| Session EM+NS+PS-MoM |
| Session: | More Moore! Materials and Processes to Extend CMOS Another Decade |
| Presenter: | Joshua Robinson, The Pennsylvania State University |
| Correspondent: | Click to Email |
The last decade has seen nearly exponential growth in the science and technology of two-dimensional materials. Beyond graphene, there are a variety of layered materials that provide a broad range of electronic characteristics useful for transistors, flexible electronics, sensors, and photodetectors, to name a few. However, bridging the gap between science and teechnology often lies in one’s ability to synthesize materials on the wafer scale (or bigger). In this talk, I will discuss recent breakthroughs for direct growth of two-dimensional atomic layers and heterostructures with scalable techniues such as metal-organic chemical vapor deposition. We have demonstrated the direct growth of MoS2, WSe2, MoS2/WSe2, and hBN on epitaxial graphene to form large area van der Waals heterostructures. We reveal that the properties of the underlying substrate dictate properties of the layers and heterostructures, and that the direct synthesis of TMDs on epitaxial graphene exhibits atomically sharp interfaces. Our work has lead to a better understanding of vertical transport in 2D heterostructures, and we have identified new phenomenon in multi-junction heterostructures that has lead to resonance tunneling between layers and ultimately negative differential resistance.
1. Eichfeld, S. M.; Hossain, L.; Lin, Y.-C.; Piasecki, A. F.; Kupp, B.; Birdwell, A. G. G.; Burke, R. A.; Lu, N.; Peng, X.; Li, J.; et al. Highly Scalable, Atomically Thin WSe2 Grown via Metal-Organic Chemical Vapor Deposition. ACS Nano 2015.
2. Y.C. Lin, C.-Y. Chang, R. Ghosh,J.Li, H.Zhu, R.Addou, B.Diaconescu, T.Ohta, X.Peng, N.Lu, M.J. Kim, J.T. Robinson, R.M.Wallace, T.Mayer, S.Datta, L.J. Li, J.A. Robinson; Atomically Thin Heterostructures based on Single-Layer Tungsten Diselenide and Graphene; Nano Letters
3. M. S. Bresnehan, G. Bhimanapati, K. Wang, D.Snyder, J.A.Robinson; Impact of Copper Overpressure on the Synthesis of Hexagonal Boron Nitride Atomic Layers; ACS Appl. Mater. Interfaces, 6, 16755–16762 (2014)
4. S.M. Eichfeld, C.M. Eichfeld, Y.C. Lin, L. Hossain, J.A. Robinson; Rapid, non-destructive evaluation of ultrathin WSe2 using spectroscopic ellipsometry; APL Materials 2 (9), 092508
5. Y.C. Lin, N. Lu, N. Perea-Lopez, J. Li, C.H. Lee, Z.Lin, P.N. Browning, M.S. Bresnehan, L. Calderin, M.J. Kim, T.S. Mayer, M. Terrones, J.A. Robinson; Direct Synthesis of van der Waals Solids on Epitaxial Graphene; ACS Nano 8 (4), 3715-3723 (2014)