| AVS 62nd International Symposium & Exhibition | |
| Plasma Science and Technology | Thursday Sessions |
| Session PS-ThP |
| Session: | Plasma Science and Technology Poster Session |
| Presenter: | Po-Wei Ye, National Taiwan University, Taiwan, Republic of China |
| Authors: | P.W. Ye, National Taiwan University, Taiwan, Republic of China C.C. Hsu, National Taiwan University, Taiwan, Republic of China |
| Correspondent: | Click to Email |
A low-cost and portable dielectric-barrier-discharge-type microplasma generation device (MGD) and the use of this MGD to detector volatile organic compounds are presented. This MGD was made of double-side copper laminate (CCL) and the MGD electrode patterns were defined using the toner-transfer method. Which enables defining the patterns with resolution down to approximately 150 mm without the need of using cleanroom facilitates. Using this MGD with a specially designed electrode arrangement, an applied voltage of 20 kHz and 500 Vrms is sufficient to ignite and sustain stable plasmas in an Argon-rich atmosphere. When the plasma is ignited in Argon atmosphere with a controlled amount of organic compounds addition, carbon-related optical emissions, namely CH(430.29nm) and C2(513.5nm), are observed using a spectrometer. With this MGD, the detection limit for methanol, ethanol, and acetone are 248 48, and208ppm, respectively. A nearly linear calibration curve can be obtained for ethanol with a concentration range from 50 to 1000 ppm.