| AVS 62nd International Symposium & Exhibition | |
| Plasma Science and Technology | Thursday Sessions |
| Session PS-ThP |
| Session: | Plasma Science and Technology Poster Session |
| Presenter: | Yu-Hsin Huang, National Taiwan University, Taiwan, Republic of China |
| Authors: | Y.H. Huang, National Taiwan University, Taiwan, Republic of China C.C. Hsu, National Taiwan University, Taiwan, Republic of China C.M. Wang, National Taiwan University, Taiwan, Republic of China |
| Correspondent: | Click to Email |
Microplasmas offer great potential in gas conversion. In this work, we present the use of a low cost microplasma generation device (MGD) for carbon dioxide and methane conversion. This MGD was made of double-side copper laminate (CCL) and the MGD electrode patterns were defined using the toner-transfer method, which does not require the use of cleanroom facilitates. Two types of system arrangements are tested. In the first arrangement, a MGD was placed in a closed controlled volume with the gas flowing into the system. In the second arrangement, the MGD was integrated with flow channels fabricated on Polydimethylsiloxane ( PDMS) devices, which allows for effective plasma-treated gas interaction. With the second arrangement, the conversion of CO2 was tested at the conditions of 10 KHz and 2.7 KVpp applied voltage, which yields the formation of CO as high as 40000 ppm, which is nearly seven times higher than that obtained using the first arrangement. We will also show the use of these systems to perform the conversion of CH4 into higher hydrocarbons. Finally, we will discuss the potential using this system for industrial manufacturing processes as a novel platform for gas conversion.