AVS 62nd International Symposium & Exhibition | |
Plasma Science and Technology | Thursday Sessions |
Session PS-ThA |
Session: | Plasma Sources |
Presenter: | Shuo Huang, University of Michigan |
Authors: | S. Huang, University of Michigan V. Volynets, Samsung Electronics Co., Ltd., Republic of Korea S. Lee, Samsung Electronics Co., Ltd., Republic of Korea I.-C. Song, Samsung Electronics Co., Ltd., Republic of Korea S. Lu, Samsung Electronics Co., Ltd., Republic of Korea J.R. Hamilton, University College London, UK J. Tennyson, University College London, UK M.J. Kushner, University of Michigan |
Correspondent: | Click to Email |