AVS 62nd International Symposium & Exhibition | |
Plasma Science and Technology | Wednesday Sessions |
Session PS+TF-WeA |
Session: | Plasma Deposition and Plasma Assisted ALD |
Presenter: | Thomas Fuerst, Colorado School of Mines |
Authors: | T.F. Fuerst, Colorado School of Mines C.A. Wolden, Colorado School of Mines |
Correspondent: | Click to Email |
A wide variety of applications such as solar cells, displays, and electrochromics require coatings that manipulate light and provide protective barriers. Silica-titania multilayers have long served as optical components on rigid substrates. Expanding this platform to flexible substrates would allow compatibility with roll-to-roll manufacturing, which would increase manufacturing efficiencies while decreasing costs. Incorporating self-cleaning properties into these coatings would enable longer lifetime, improved efficiency, and reduced maintenance costs for the devices. In this work we describe the design, fabrication, and evaluation of flexible multilayer coating deposited by plasma-enhanced chemical vapor deposition (PECVD) at low temperature. The high and low refractive index materials were TiO2 and silicone, respectively. PECVD enables the deposition of high quality material at temperatures compatible with polymeric substrates. Silicone is a mechanically robust polymer that imparts flexibility to the coatings and TiO2 provides UV protection and self-cleaning functionality. The optical stacks were designed using commercial software and validated using UV-Vis-NIR spectrophotometry. The nanoscale control achievable in this process was demonstrated through the fabrication of several Bragg mirrors that were designed to produce blue, green, and red coatings. A five layer broadband anti-reflective (AR) coating was designed and deposited onto a variety of substrates including 1 mm glass, 3 mm FTO-coated glass (TEC-15), flexible polyethylene terephthalate (PET) thin films, and CdTe solar cells built on TEC-15. The absolute transmission of AR-coated glass and PET samples increased by ~5% across the visible spectrum, and solar cells experienced a commensurate boost in efficiency due to improved short circuit density. The multilayer coatings on PET proved to be mechanically robust, as their optical properties remain unchanged after 50,000 cycles of automated bend testing, including both tensile and compressive stress. Lastly, a five layer IR reflector was designed and applied to 1 mm glass and PET. The visible transmittance remained unchanged while the near IR (800-1200 nm) transmission was reduced from 88% to 27% on PET. Studies are underway to assess the long term durability of these coatings to UV exposure and examine the self-cleaning capability through measurements of contact angle and contaminant removal. These results indicate that these nanolaminates show great promise for use in a variety of flexible optoelectronic applications.