AVS 61st International Symposium & Exhibition
    Plasma Science and Technology Tuesday Sessions
       Session PS-TuM

Invited Paper PS-TuM1
Directed Irradiation Synthesis: Manipulating Matter in Nanoscale Self-Organized Systems

Tuesday, November 11, 2014, 8:00 am, Room 308

Session: Plasma Surface Interactions I
Presenter: Jean Paul Allain, University of Illinois at Urbana-Champaign
Authors: J.P. Allain, University of Illinois at Urbana-Champaign
Z. Koyn, University of Illinois at Urbana-Champaign
B. Holybee, University of Illinois at Urbana-Champaign
S. Arias, University of Illinois at Urbana-Champaign
Correspondent: Click to Email

Deciphering self-organization mechanisms of nanostructures (e.g. nanodots, ripples) on compound semiconductors and silicon via low-energy ion-beam assisted plasma irradiation is critical to manipulate functionality in nanostructured systems. By operating at ultra-low energies near the damage threshold, irradiation-driven defect engineering can be optimized (e.g. 10-500 eV). Tunability of optical, electronic, magnetic and nuclear detection properties is realized by reaching metastable phases controlled by irradiation. This talk summarizes emerging research that exploits irradiation-driven materials modification with applications in: nanophotonics, nanoelectronics, biomaterials and nuclear detection. Furthermore advances of in-situ analysis conducted during modification to correlate tunable irradiation synthesis and device performance will be summarized.