AVS 58th Annual International Symposium and Exhibition | |
Spectroscopic Ellipsometry Focus Topic | Friday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
8:20am | EL+AS+EM+MS+PS+TF-FrM1 Invited Paper Current Trends and Future Outlook for Spectroscopic Ellipsometry James Hilfiker, B. Johs, C.M. Herzinger, T.E. Tiwald, J.A. Woollam Co., Inc. |
9:00am | EL+AS+EM+MS+PS+TF-FrM3 THz Optical Hall-effect and MIR-VUV Ellipsometry Characterization of 2DEG Properties in a HfO2 Passivated AlGaN/GaN HEMT Structure Stefan Schöche, U. of Nebraska - Lincoln, J. Shi, Cornell U., A. Boosalis, P. Kühne, U. of Nebraska - Lincoln, C.M. Herzinger, J.A. Woollam, J.A. Woollam Co., Inc., W.J. Schaff, L.F. Eastman, Cornell U., V. Darakchieva, Linkoping U., Sweden, M. Schubert, T. Hofmann, U. of Nebraska - Lincoln |
9:20am | EL+AS+EM+MS+PS+TF-FrM4 Vector-Magneto-Optical Generalized Ellipsometry on Sculptured Thin Films Daniel Schmidt, C. Briley, E. Schubert, M. Schubert, University of Nebraska - Lincoln |
9:40am | EL+AS+EM+MS+PS+TF-FrM5 THz Dielectric Anisotropy of Metal Slanted Columnar Thin Films Tino Hofmann, D. Schmidt, A. Boosalis, P. Kühne, R. Skomski, University of Nebraska-Lincoln, C.M. Herzinger, J.A. Woollam, J.A. Woollam Co., Inc., M. Schubert, E. Schubert, University of Nebraska-Lincoln |
10:00am | EL+AS+EM+MS+PS+TF-FrM6 A Compact High-speed Spectroscopic Ellipsometer Gai Chin, ULVAC Inc., Japan |
10:20am | EL+AS+EM+MS+PS+TF-FrM7 Ellipsometry Porosimetry (EP): In Situ Spectroscopic Ellipsometry Measurements Coupled with Pressure Controlled Adsorption of Organic Vapors to Study Properties of Nano-Porous Thin Films J.P. Piel, L. Kitzinger, A. Bondaz, C. Defranoux, SEMILAB-SOPRALAB, France |