AVS 58th Annual International Symposium and Exhibition
    Spectroscopic Ellipsometry Focus Topic Friday Sessions

Session EL+AS+EM+MS+PS+TF-FrM
Spectroscopic Ellipsometry: Future Directions and New Techniques

Friday, November 4, 2011, 8:20 am, Room 209
Moderator: Herbert Wormeester, MESA, The Netherlands


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Click a paper to see the details. Presenters are shown in bold type.

8:20am EL+AS+EM+MS+PS+TF-FrM1 Invited Paper
Current Trends and Future Outlook for Spectroscopic Ellipsometry
James Hilfiker, B. Johs, C.M. Herzinger, T.E. Tiwald, J.A. Woollam Co., Inc.
9:00am EL+AS+EM+MS+PS+TF-FrM3
THz Optical Hall-effect and MIR-VUV Ellipsometry Characterization of 2DEG Properties in a HfO2 Passivated AlGaN/GaN HEMT Structure
Stefan Schöche, U. of Nebraska - Lincoln, J. Shi, Cornell U., A. Boosalis, P. Kühne, U. of Nebraska - Lincoln, C.M. Herzinger, J.A. Woollam, J.A. Woollam Co., Inc., W.J. Schaff, L.F. Eastman, Cornell U., V. Darakchieva, Linkoping U., Sweden, M. Schubert, T. Hofmann, U. of Nebraska - Lincoln
9:20am EL+AS+EM+MS+PS+TF-FrM4
Vector-Magneto-Optical Generalized Ellipsometry on Sculptured Thin Films
Daniel Schmidt, C. Briley, E. Schubert, M. Schubert, University of Nebraska - Lincoln
9:40am EL+AS+EM+MS+PS+TF-FrM5
THz Dielectric Anisotropy of Metal Slanted Columnar Thin Films
Tino Hofmann, D. Schmidt, A. Boosalis, P. Kühne, R. Skomski, University of Nebraska-Lincoln, C.M. Herzinger, J.A. Woollam, J.A. Woollam Co., Inc., M. Schubert, E. Schubert, University of Nebraska-Lincoln
10:00am EL+AS+EM+MS+PS+TF-FrM6
A Compact High-speed Spectroscopic Ellipsometer
Gai Chin, ULVAC Inc., Japan
10:20am EL+AS+EM+MS+PS+TF-FrM7
Ellipsometry Porosimetry (EP): In Situ Spectroscopic Ellipsometry Measurements Coupled with Pressure Controlled Adsorption of Organic Vapors to Study Properties of Nano-Porous Thin Films
J.P. Piel, L. Kitzinger, A. Bondaz, C. Defranoux, SEMILAB-SOPRALAB, France