| AVS 58th Annual International Symposium and Exhibition | |
| Applied Surface Science Division | Monday Sessions |
| Session AS-MoM |
| Session: | Quantitative Surface Chemical Analysis and Technique Development - Part I |
| Presenter: | Lance Lohstreter, Medtronic, Inc |
| Authors: | L. Lohstreter, Medtronic, Inc R. Sanderson, Dalhousie University, Canada J. Dahn, Dalhousie University, Canada |
| Correspondent: | Click to Email |
Information about the layer structure of surfaces at the angstrom level can be probed through X-ray Photoelectron Spectroscopy (XPS) by analyzing the structure of the entire spectrum, including the inelastic background. Model samples were prepared through a unique magnetron sputtering system to create thin film gradients ranging from two angstroms to hundreds of angstroms thick across a distance of seven centimeters. The system studied consisted of a titania wedge on a gold substrate. The samples were characterized using Variable Angle Spectroscopic Ellipsometry (VASE) to measure the thickness of the wedge along the sample at many points along the gradient. The thickness values from the XPS and VASE modeling were shown to have excellent linearity from two angstroms until the XPS photoelectron peak was extinguished. The effective attenuation lengths of the titania at the kinetic energies of the various gold photoelectron peaks were also measured and compared to theoretical values for inelastic mean free path. The values were within 29% of each other.