AVS 58th Annual International Symposium and Exhibition
    Applied Surface Science Division Monday Sessions
       Session AS-MoM

Paper AS-MoM10
Large Area Quantitative XPS Imaging for Small Feature Compositional Screening

Monday, October 31, 2011, 11:20 am, Room 102

Session: Quantitative Surface Chemical Analysis and Technique Development - Part I
Presenter: Sarah Coultas, Kratos Analytical Ltd, UK
Authors: S.J. Coultas, Kratos Analytical Ltd, UK
C.J. Blomfield, Kratos Analytical Ltd, UK
S.J. Hutton, Kratos Analytical Ltd, UK
A.J. Roberts, Kratos Analytical Ltd, UK
D.J. Surman, Kratos Analytical Inc.
Correspondent: Click to Email
Many technologically important devices require nanometre level chemical characterisation over areas of several square mm, or even cm, for applications such as coating continuity and integrity or contamination monitoring.

The traditional approach when employing XPS for this application has been to acquire a number of small area spectra at different points. The advent of quantitative parallel XPS imaging introduced the possibility of faster acquisition times and higher spatial resolution than the traditional small XPS probe approach.

Here we present an alternative approach whereby multiple features are simultaneously analysed over a large area using XPS imaging. Acquisition conditions and post acquisition data treatment to optimise this approach on a range of samples will be discussed

This approach provides both a faster and more easily interpreted graphical method for multiple feature analysis.

We present examples of this approach on a variety of samples.