VT-TuP1
Construction of a Laboratory Based Resistance Thermal Evaporator and/or Sputtering Module and the Associated Safety Systems
V. Lambe, A. Pender, Institute of Technology Tallaght, Ireland |
VT-TuP2
A Study of a Method to Evaluate the Corrosion Resistance of Al2O3 Coated Vacuum Components for Semiconductor Equipment
J.Y. Yun, S.W. Kang, KRISS, Korea, S.M. You, J.S. Shin, Daejeon University, Korea |
VT-TuP4
The PM-IRRAS Study of Water Thin Film on Aluminum Alloy Surface with Vacuum Pumping Down Process Condition
H.P. Hsueh, NSRRC, Taiwan, W.F. Liu, NTHU, Taiwan, C.K. Chan, G.Y. Hsiung, NSRRC, Taiwan, J.R. Chen, NSRRC and NTHU, Taiwan |
VT-TuP5
A Novel, UHV Analysis System for Detecting Electron Stimulated Reaction Products Generated during Field Emission Studies
M. Bagge-Hansen, R.A. Outlaw, M.Y. Zhu, H. Chen, D.M. Manos, The College of William and Mary |
VT-TuP6
A Compact Deposition Chamber Design for Low Temperature Growth of Ultra-Thin Crystalline Films on Metal-Insulator-Semiconductor Devices
R.E. Lake, J.R. Puls, M.P. Ray, C.E. Sosolik, Clemson University |
VT-TuP7
HORST - A New Device for Digital In-Line X-ray Holography
F. Staier, A. Rosenhahn, M. Grunze, University of Heidelberg, Germany |
VT-TuP8
The Titan Blimp
J.T. Hagen, Cedarville University |
VT-TuP9
Scaling of Low-Pressure Transport Coefficients for Gas Mixture Flow in a Tube
M. Vukovic, Tokyo Electron, US Holdings |
VT-TuP10
Vacuum Pressure Simulation for the Upgrade of Front-End at NSLS Insertion Device Beamline
J.-P. Hu, Brookhaven National Laboratory |
VT-TuP11
Thermistor Vacuum Gauge; High Sensitivity Shows Direction and Acceleration Which Enables Vacuum Leak Detection
D. Casilio, R. Kromer, Myers Vacuum |