| AVS 55th International Symposium & Exhibition | |
| Vacuum Technology | Tuesday Sessions |
| Session VT-TuP |
| Session: | Poster Session, Including Student Poster Competition |
| Presenter: | V. Lambe, Institute of Technology Tallaght, Ireland |
| Authors: | V. Lambe, Institute of Technology Tallaght, Ireland A. Pender, Institute of Technology Tallaght, Ireland |
| Correspondent: | Click to Email |
Construction of a laboratory based resistance thermal evaporator and/or sputtering module and the associated safety systems. This student project involves building both the vacuum system consisting of bell jar, turbo and rotary vein pump and associated ducting and valves. The high voltage system consists of a 30A dc power supply and associated circuitry. The aim of the project was to evaporate and characterise aluminium deposition on silicon (thickness versus time, power versus thickness etc). An addition aim was to characterise the equipment and provide documentation for the user. A simple film thickness monitor is to be built and installed into the system. In particular the student has concentrated on the safety aspects of the design. These includes, 1. Half atmosphere switch to protect the turbopump 2. EMO and breaker circuitry for the high voltage power supply 3. Interlocks for the power supply 4. Air driven vacuum interlock to protect against high voltage.