| AVS 55th International Symposium & Exhibition | |
| Vacuum Technology | Tuesday Sessions |
| Session VT-TuP |
| Session: | Poster Session, Including Student Poster Competition |
| Presenter: | J.Y. Yun, KRISS, Korea |
| Authors: | J.Y. Yun, KRISS, Korea S.W. Kang, KRISS, Korea S.M. You, Daejeon University, Korea J.S. Shin, Daejeon University, Korea |
| Correspondent: | Click to Email |
This study is concerned with the evaluation of the corrosion resistance of coated semiconductor equipment parts with various processes. To select the appropriate basis for evaluation, replacement parts were observed during the semiconductor manufacturing process. This study also ran a dry corrosion test using Al2O3, which is mostly used as a coating material. This test quantitatively measured the efficiency of coated parts. Surface morphology, leakage current and breakdown voltage were also evaluated. This study showed that the leakage current increased and the dielectric strength largely decreased after a dry corrosion process that led to the drop of electrical properties. The surface morphology test produced found that surface impairment can be severe depending on exposure to corrosive environments. By using the values that changed during the corrosion process, it may be possible to contrive a method to evaluate the efficiency of coated parts with various processes.