AVS 55th International Symposium & Exhibition
    Thin Film Wednesday Sessions

Session TF-WeM
Chemical Vapor Deposition

Wednesday, October 22, 2008, 8:00 am, Room 302
Moderator: P.D. Rack, University of Tennessee


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:00am TF-WeM1 Invited Paper
Growth and Functional Properties of Thin Film Oxides Synthesized under Photon Irradiation
S. Ramanathan, Harvard University
8:40am TF-WeM3
A Zone Diagram for Conformal Film Growth by CVD
J.R. Abelson, A. Yanguas-Gil, N. Kumar, Y. Yang, University of Illinois at Urbana-Champaign
9:00am TF-WeM4
Conformal Chemical Vapor Deposition of Metal Oxide Thin Films using Metal-Diboranamide Precursors
A. Yanguas-Gil, N. Kumar, S.R. Daly, Y. Yang, G.S. Girolami, J.R. Abelson, University of Illinois at Urbana-Champaign
9:20am TF-WeM5
Chemical Vapor Deposition of WNxCy using Tungsten Piperidylhydrazido Complex: Deposition, Characterization and Diffusion Barrier Evaluation
D.J. Kim, O.H. Kim, T.J. Anderson, J. Koller, L. McElwee-White, C.L. Leu, J.M. Tsai, D.P. Norton, University of Florida
9:40am TF-WeM6
Conformality of Chemical Vapor Deposited Copper Oxide Thin Films in High Aspect Ratio Features for ULSI/MEMS Applications
Y. Shimogaki, Y. Susa, The University of Tokyo, Japan
10:40am TF-WeM9
Structure and Morphology of Pentacene Film Grown on HOPG
J. Götzen, D. Käfer, Ch. Wöll, G. Witte, Ruhr-University, Germany
11:00am TF-WeM10
Electrically Controllable Stationary Hadamard Shutter Exploiting the Semiconductor-To-Metallic Phase Transition of W-doped VO2 Arrays
M. Soltani, M. Chaker, INRS-Énergie, Matériaux et Télécommunications, Canada, E. Haddad, R.V. Kruzelecky, W. Jamroz, MPB Communications Inc., Canada, J. Margot, Université de Montréal, Canada, P. Laou, S. Paradis, Defence R&D Canada-Valcartier
11:20am TF-WeM11
Molecular Beams Tunable in Energy Yield Novel Growth Behavior in Small-Molecule Organic Semiconductors
A. Amassian, S. Hong, T.V. Desai, Cornell University, S. Kowarik, University of California at Berkeley, J.E. Goose, A. Papadimitratos, V.A. Pozfin, Cornell University, A.R. Woll, D.M. Smilgies, Cornell High Energy Synchrotron Source, F. Schreiber, Universität Tübingen, Germany, P. Clancy, G.G. Malliaras, J.R. Engstrom, Cornell University
11:40am TF-WeM12
Vanadium Oxide Thin Films for IR Imaging Bolometric Applications Deposited by Reactive Pulsed DC Sputtering
N.M. Fieldhouse, S.S.N. Bharadwaja, M.W. Horn, S.M. Pursel, R. Carey, Pennsylvania State University