| AVS 54th International Symposium | |
| MEMS and NEMS | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:00am | MN-MoM1 Invited Paper Materials for the Realization of High Performance Radio Frequency MEMS Devices S.P. Pacheco, Freescale Semiconductor, Inc., G. Piazza, University of Pennsylvania |
| 8:40am | MN-MoM3 Nano-Scale, Directional Contact Metal Transfer in Hot-Switched MEMS Actuators Z. Yang, D. Lichtenwalner, A. Kingon, North Carolina State University |
| 9:00am | MN-MoM4 Growth of AlN by Pulsed Laser Deposition and Reactive Sputtering Techniques and Fabrication of RF MEMS Resonators S. Hullavarad, University of Alaska Fairbanks |
| 9:20am | MN-MoM5 Science and Technology of Piezoelectric/Diamond Hybrid Heterostructures for High Performance MEMS/NEMS Devices O. Auciello, A.V. Sumant, J. Hiller, B. Kabius, Argonne National Laboratory |
| 9:40am | MN-MoM6 NEMS Resonators of Carbon Nanotube Network and Metal-Carbon Nanotube Composites J.H. Bak, Y.D. Kim, B.Y. Lee, S.S. Hong, Y.D. Park, Seoul National University, Korea |
| 10:20am | MN-MoM8 Addition and Removal of Stress to Drastically Tune Frequency and Quality Factor of Nanomechanical Resonators S.S. Verbridge, D. Finkelstein Shapiro, H.G. Craighead, J.M. Parpia, Cornell University |
| 10:40am | MN-MoM9 Noise Temperature and Thermodynamic Temperature of Ultrasensitive Cantilevers Below 1 K A.C. Bleszynski, W.E. Shanks, Yale University, B. Ilic, Cornell University, J.G.E. Harris, Yale University |
| 11:00am | MN-MoM10 Process Development and Material Characterization of Polycrystalline BiTe and PbTe Thin Film Alloys on Si for MEMS Thermoelectric Generators I. Boniche, University of Florida, B.C. Morgan, P.J. Taylor, U.S. Army Research Laboratory, C.D. Meyer, D.P. Arnold, University of Florida |
| 11:20am | MN-MoM11 Fabrication of Metal-based High Aspect Ratio Microscale Structures by Compression Molding J. Jiang, F.H. Mei, W.J. Meng, Louisiana State University |
| 11:40am | MN-MoM12 Process Characterization of Vapour Phase Sacrificial Etching A. O'Hara, G. Pringle, M. Leavy, MEMSSTAR, UK |