AVS 54th International Symposium
    MEMS and NEMS Monday Sessions
       Session MN-MoM

Paper MN-MoM9
Noise Temperature and Thermodynamic Temperature of Ultrasensitive Cantilevers Below 1 K

Monday, October 15, 2007, 10:40 am, Room 615

Session: Materials Processing, Characterization and Fabrication Aspects
Presenter: A.C. Bleszynski, Yale University
Authors: A.C. Bleszynski, Yale University
W.E. Shanks, Yale University
B. Ilic, Cornell University
J.G.E. Harris, Yale University
Correspondent: Click to Email

Micromechanical systems can be fabricated with the sensitivity necessary for detecting ultra-small forces arising from quantum mechanical effects. We use cantilevers as torsional magnetometers to study the magnetic properties of systems mounted directly on a cantilever. Our goal is to study persistent currents in normal metal rings. The properties of these currents remain an outstanding controversy in mesoscopic physics. As with all sample-on-cantilever arrangements, there are two distinct temperatures that determine the performance of the experiment: the cantilever’s Brownian motion temperature (Tn) and the temperature of the sample mounted on the cantilever (Ts). Tn is associated with a single macroscopic degree of freedom extended over the length of the cantilever. Ts on the other hand is associated with the very large number of microscopic degrees of freedom in the sample. For a high-Q cantilever, Tn, which sets the cantilever’s ultimate force sensitivity, is in weak contact with the thermal bath at temperature Tb. Ts is in contact with the bath via phonon conduction through the cantilever. This contact can also be weak for a small, electrically insulating cantilever at low temperatures. It is thus a priori uclear whether in a practical experiment Ts and Tn will equilibrate with each other or even with Tb. It is also unclear how they will respond to a localized heat source, e.g. a laser used to monitor the cantilever’s motion. We have used our sample-on-cantilever system to realize two primary thermometers to measure both Tn and Ts. We infer Tn by monitoring the cantilever’s Brownian motion and Ts from the critical magnetic field of a superconducting sample mounted on the cantilever. We find that for modest laser powers incident on the sample, these two temperatures stay equilibrated to each other and to Tb down to 300mK. For higher laser powers Ts and Tn remain equal to each other but are hotter than Tb. The temperature difference is well-described by a simple model of phonon transport along the cantilever beam. We have also fabricated single crystal silicon cantilevers with integrated micron-scale metal rings. We have demonstrated attonewton force sensitivity with these devices and will present measurements of the rings’ susceptibility in the normal and superconducting states.