| AVS 54th International Symposium | |
| MEMS and NEMS | Monday Sessions |
| Session MN-MoM |
| Session: | Materials Processing, Characterization and Fabrication Aspects |
| Presenter: | J.H. Bak, Seoul National University, Korea |
| Authors: | J.H. Bak, Seoul National University, Korea Y.D. Kim, Seoul National University, Korea B.Y. Lee, Seoul National University, Korea S.S. Hong, Seoul National University, Korea Y.D. Park, Seoul National University, Korea |
| Correspondent: | Click to Email |
We present nanomechanical torsional resonator and doubly-clamped beam resonator structures fabricated from aluminum-carbon nanotube (CNT) and palladium-CNT composites. In addition, we realize nanoelectromechanical systems (NEMS) structures suspended by self-assembled carbon nanotube network on GaAs surface by adopting highly selective wet-etching and reactive ion etching techniques. Carbon nanotubes have been spotlighted for its great potential as a promising material as well as a future candidate material for nanoelectronics, with CNT’s unique electrical and mechanical properties. NEMS structure combined with CNT can be applied to elucidate the nanotube’s physical properties as well as further applications. Furthermore, metallic based NEMS resonator structures are of interest due to higher optical reflectivity, ductility, and conductivity compared to insulator- and semiconductor- based NEMS structures. The resonators are electrostatically driven and are detected at room temperatures under moderate vacuum conditions using optical modulation techniques. From identifying fundamental flexural and rotational modes as well as applying continuum mechanics equations, we observe a significant enhancement of the Young’s modulus in metallic resonators structures with added CNTs. We will also discuss the characterization of mechanical properties of the structures by AFM force deflection spectroscopy and compare the two characterization techniques.