| AVS 54th International Symposium | |
| Plasma Science and Technology | Thursday Sessions |
| Session PS-ThP |
| Session: | Plasma Science and Technology Poster Session |
| Presenter: | B. Jacobs, University of California - Los Angeles |
| Authors: | B. Jacobs, University of California - Los Angeles W. Gekelman, University of California - Los Angeles M. Barnes, Intevac Corporation P. Pribyl, University of California - Los Angeles |
| Correspondent: | Click to Email |
Planar Laser-Induced Fluorescence (LIF) measurements of ion velocity distribution functions have been made in an inductively coupled plasma reactor with a pulsed plasma source. Vertical and radial velocities have been measured at thousands of spatial locations within a plane, and the LIF data has been calibrated to a 96 GHz microwave interferomter. The ion behavior in the presheath region above the wafer is investigated in particular.