Paper PS-ThP14
Performance Characteristics of Inductively Coupled rf Ion Source for Low-energy Neutral Beam

Thursday, October 18, 2007, 5:30 pm, Room 4C

Low-energy neutral beam sources are very promising candidates for the next-generation nano-processing. To realize high-flux low-energy neutral beam, we have developed a novel 13.56 MHz radio frequency inductively coupled ion source. Argon ion beam velocity distributions were measured by dye laser-induced fluorescence technique and compared with electrostatic retarding field analyzer(RFA). We describe the extraction system which enables our ion beam source to have high ion beam current densities at very low energy (<50 eV) region without broadening of beam divergence or energy in comparison with conventional ion beams. Synchronized Pulse biasing technique is applied when operating SF₆ pulsed plasma.