AVS 66th International Symposium & Exhibition
    Thin Films Division Monday Sessions
       Session TF+EM+MI+MN+OX+PS-MoM

Paper TF+EM+MI+MN+OX+PS-MoM5
Epitaxial Growth of Antiferromagnetic NiO Films by Off-axis Sputtering for Spintronic Devices

Monday, October 21, 2019, 9:40 am, Room A122-123

Session: Functional Thin Films: Ferroelectric, Multiferroics, and Magnetic Materials
Presenter: Larry Scipioni, PVD Products, Inc.
Authors: A. Churikova, Massachusetts Institute of Technology
G.S.D. Beach, Massachusetts Institute of Technology
L. Scipioni, PVD Products, Inc.
A. Shepard, PVD Products, Inc.
J. Greer, PVD Products, Inc.
T. Newhouse-Illige, PVD Products, Inc.
Correspondent: Click to Email

High-quality epitaxial growth of antiferromagnetic thin films is essential for future spintronic devices, as it allows small antiferromagnetic domain sizes and efficient electrical manipulation of domain walls via reading and writing currents. Antiferromagnetic materials are candidates for ultrafast operation due to THz antiferromagnetic spin dynamics, high packing densities due to the absence of stray magnetic fields, and stability due to insensitivity to external magnetic fields [1,2]. Meanwhile, the long spin diffusion lengths [3] and theoretically predicted superfluid transport of spin currents [4] in antiferromagnetic insulators are crucial for low-power device operation. The electrical control of magnetic spin textures has been thus far realized in epitaxially grown NiO on MgO substrates [5] and ferrimagnetic maghemite (γ−Fe2O3) and magnetite (Fe3O4) thin films [6].

We report the preparation of antiferromagnetic NiO thin films with (111) orientation on c-plane sapphire (1000) substrates by off-axis RF magnetron sputtering from a NiO target. The off-axis angle was 45°, and the sputtering pressure was 5 mTorr. Samples were grown with thicknesses ranging from 5 – 50 nm, and with growth temperatures from room temperature to 600°C, to determine optimum conditions. Structural characterization by x-ray diffraction demonstrates a high degree of epitaxy across a range of deposition temperatures and thicknesses. The deposition temperature and thickness dependence of epitaxial quality is investigated, with a characterization of the strain state, mosaicity, and crystallographic relationship between substrate and film. Evidence for antiferromagnetic order forming domains in NiO is provided via magnetic characterization of the films. Our results are essential for the optimization of the fabrication of high quality epitaxial antiferromagnetic films for practical spintronics devices.

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