AVS 66th International Symposium & Exhibition
    Plasma Science and Technology Division Wednesday Sessions
       Session PS+EM-WeM

Paper PS+EM-WeM3
Combinatorial Synthesis of Ternary Oxides by Reactive Sputtering for CdTe Solar Cells

Wednesday, October 23, 2019, 8:40 am, Room B131

Session: Plasma Processing of Materials for Energy
Presenter: Yegor Samoilenko, Colorado School of Mines
Authors: Y. Samoilenko, Colorado School of Mines
G. Yeung, Colorado School of Mines
C.A. Wolden, Colorado School of Mines
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Polycrystalline CdTe-based solar cells have reached efficiencies of over 22% in the recent years. The road towards high Voc and 25% devices requires a combination of low interface recombination velocity, higher lifetime, and higher carrier concentration in the CdTe absorber. It was recently demonstrated that the impact of the interface recombination on the performance of the device is more pronounced as carrier concentration and lifetime increase. Magnesium zinc oxide (MZO) has been identified as a transparent emitter that enables high efficiency in CdTe based solar cells. By controlling the alloy composition one may tune the conduction band alignment with CdTe absorber at the front interface to reduce recombination. Most previous work has employed MZO targets sputtered in Ar. However there are open questions as to what the optimal composition, its stability, and sensitivity to subsequent processing.In this work we perform a combinatorial study of MZO buffer layer prepared by co-sputtering of Zn and Mg in oxygen-containing atmosphere. Combinatorial libraries are formed with a band gap variation of more than 0.4 eV across a 2 inch substrate. These are integrated into standard CdTe to determine the optimal composition based on using J-V characteristics. In addition, the stability of these films is assessed by surface spectroscopy, and routes to stabilize performance are introduced.