AVS 66th International Symposium & Exhibition
    Exhibitor Technology Spotlight Workshops Tuesday Sessions
       Session EW-TuL

Paper EW-TuL5
New Versatile and Compact In Situ AugerProbe from Staib Instruments for REELS & Auger Analyses in Growth Environments Even Under Higher Pressures

Tuesday, October 22, 2019, 1:20 pm, Room Hall A

Session: Exhibitor Technology Spotlight Workshop II
Presenter: Eric Dombrowski, Staib Instruments, Inc.
Correspondent: Click to Email
Here we present recent updates for Staib Instrument's versatile and compact AugerProbeTM, winner of the 2016 R&D 100 award. This high sensitivity and throughput electron energy analyzer is adaptable to environments from UHV surface analysis to in-situ growth. The Probe is used to collect Auger data for elemental analysis. In addition, the high resolution achieved through the entire energy range (20-2000 eV) permits collection of high quality Reflection Electron Energy Loss Spectroscopy (REELS) data for bonding and compositional analysis. The control software acquires user programmable sequences for individual energy ranges, with the added ability to record Auger intensities over time to assess dynamic surface changes. By coupling this analyzer with a Reflection High-Energy Electron Diffraction (RHEED) excitation source, the surface crystallographic structure can be assessed concurrently with the Auger derived elemental makeup and REELS surface energy loss structure. The AugerProbeTM is ideal for applications where high pressures and/or harsh deposition conditions are utilized. The Probe provides a better understanding of the structure and composition of materials, a useful tool for developing new and novel functional devices. By expanding the scope of possible materials, deposition techniques, and growth procedures, the AugerProbeTM analyzer can ultimately aid new developments and maintain fidelity of existing procedures. The AugerProbeTM is a flexible solution in providing Auger and REELS results.