AVS 66th International Symposium & Exhibition
    Spectroscopic Ellipsometry Focus Topic Thursday Sessions
       Session EL-ThP

Paper EL-ThP1
Teaching Ellipsometry to Undergraduates

Thursday, October 24, 2019, 6:30 pm, Room Union Station B

Session: Spectroscopic Ellipsometry Focus Topic Poster Session
Presenter: John Woollam, University of Nebraska-Lincoln
Correspondent: Click to Email
Ellipsometry is taught at universities at different levels. This class is a beginning course at the undergraduate level for students who have not had classes in optics or solid-state physics. We use Fujiwara’s Spectroscopic Ellipsometry1, Collett’s Field Guide to Polarization2, and other sources for basic theory. We have simple in-class experiments to demonstrate basic concepts. The most unique aspect of our class is the use of a 1960s Gaertner model L119 manual null ellipsometer. The instrument is ideal to demonstrate alignment of light source, rotation axis of instrument, and sample to rotation axis of instrument. In addition, students “calibrate” Ps and As, the azimuth offset positions of the polarizer and analyzer. They learn practical aspects of polarizers, retarders, and multiple reflections from optical elements. They measure P- and S-reflectance vs. angle of incidence and compare to predictions by Fresnel equations.

Students measure polarization state of light by null ellipsometry, rotating analyzer ellipsometry (by hand!), and Stokes parameter methods. They compare results of all three methods and explain sources of systematic and random errors. They are then shown how modern ellipsometry instruments drastically reduce both types of errors. The course generally has 6 to 8 students, making laboratory aspects practical and educational. The combination of classroom demonstrations, theory, and hands-on experiments is both fun and an effective learning process.

1. H. Fujiwara, Spectroscopic Ellipsometry (Wiley, West Sussex, England, 2007).

2. E. Collett, Field Guide to Polarization (SPIE Press, Bellingham, Washington, 2005).