Invited Paper AS+BI+CA+LS-TuA1
Nanotechnology as a Driver for Going Beyond Traditional Surface Analysis

Tuesday, October 22, 2019, 2:20 pm, Room A211

In the last 10 years, the progress of analytical methods has been more and more strongly connected to the pressing needs from materials and processing developments in the nanoelectronics industry. The field of materials analysis is now expanding as more and more complementary information are needed to tailor new materials for particular applications. Time-consuming techniques in the past (e.g, ARPES) are now accessible with increasing throughput, whereas the reliability of others, such as depth profiling, is improving. Finally, techniques like HAXPES implemented in the past only at synchrotron facilities, are now entering into laboratories.

In this talk I will illustrate by a series of examples in the field of device technology this evolution of surface analysis getting beyond traditional methods, driven by technological developments.