| AVS 65th International Symposium & Exhibition | |
| Thin Films Division | Monday Sessions |
| Session TF2-MoM |
| Session: | IoT Session: Thin Film Processes for Energy Storage |
| Presenter: | Gary Rubloff, University of Maryland, College Park |
| Authors: | G. Rubloff, University of Maryland, College Park K. Gregorczyk, University of Maryland, College Park A. Pearse, Control Electron S.B. Lee, University of Maryland, College Park A.A. Talin, Sandia National Laboratories, Livermore |
| Correspondent: | Click to Email |
Solid state batteries (SSBs) offer several major advantages over the lithium ion rechargeable batteries that dominate today - most notably safety, design versatility that broadens the application space, and potentially higher performance. The safety benefit is largely ensured by avoiding flammable organic liquid electrolytes. Design flexibility is derived from the thin film processing approaches naturally employed in solid state batteries, accommodating various form factors consistent with patterning approaches at the heart of microelectronics manufacturing. A major step toward enhanced performance has recent emerged in 3D SSBs that deliver high power and energy, enabled by structures which extend to high aspect ratios. The promise they show is exemplified in SSBs based on thin film sputter deposition and more recently on atomic layer deposition (ALD), achieving a fully conformal 3D SSB with ALD multilayers serving as electrodes, solid electrolyte, and current collecting layers over high aspect ratio features. The resulting interdigitated 3D architecture exhibit the profound performance improvements expected. We consider the potential of this and other promising architectures, along with their pros and cons with respect to process sequence complexity and manufacturability.
This work was supported by Nanostructure for Electrical Energy Storage
(NEES) II, an Energy Frontier Research Center funded by the
U.S. Department of Energy, Office of Science, Office of Basic
Energy Sciences (Award no. DESC0001160).