AVS 65th International Symposium & Exhibition
    Thin Films Division Monday Sessions
       Session TF2-MoM

Paper TF2-MoM4
Fast-charging 3D Battery Electrodes with High-Capacity Materials Using Large Area Atmospheric Pressure Spatial ALD

Monday, October 22, 2018, 9:20 am, Room 104B

Session: IoT Session: Thin Film Processes for Energy Storage
Presenter: Lucas Haverkate, Holst Centre / TNO, The Netherlands
Authors: L.A. Haverkate, Holst Centre / TNO, The Netherlands
S. Unnikrishnan, Holst Centre / TNO, The Netherlands
D. Hermes, Holst Centre / TNO, The Netherlands
F. Roozeboom, Eindhoven University of Technology, The Netherlands
F. Zorro, Holst Centre / TNO, The Netherlands
F. Grob, Holst Centre / TNO, The Netherlands
E. Balder, Holst Centre / TNO, The Netherlands
P. Poodt, Holst Centre / TNO and SALDtech B.V., Netherlands
M. Tulodziecki, Holst Centre / TNO, The Netherlands
Correspondent: Click to Email
The key challenges in next-generation all-solid state Li-ion battery technology development are related to the required energy and power densities, fast charging constraints, battery lifetime & safety hazards, and at the same time keeping the cost low by high-volume production. Such technology criteria require superior electrode as well as electrolyte materials (pinhole-free), and processing techniques enabling even advanced 3D designs. Apart from enabling fast-chargeability, 3D electrode architectures pave the way for the use of high-capacity materials without long-term cycling challenges.

However, newer architectures demand newer processing techniques, especially for conformal coating over three-dimensional structures. An technology researched fundamentally a lot in this respect is the Atomic Layer Deposition (ALD), which is well-known for its superior material quality and layer conformality over ultrahigh aspect ratio topology. But, in applications outside the advanced micro- and nanoelectronics industry, ALD technology is impeded by the economics of the low film deposition rates. Here, the scalable atmospheric pressure Spatial ALD (sALD) holds the best promise for sufficient deposition rates and large-area roll-to-roll processability, which is key to battery industry.

We will present about high-rate 3D Li-ion battery electrodes with sALD, which show charging speeds of 12 mins or less. Highlighted will be the development of new high performance battery electrode materials (in-situ doped titanate based) by engineering material properties at the nanoscale. Next to it, we will present about the first-ever sALD based LIPON electrolyte material (<100nm thick) exhibiting Li-ion conductivity > 10-7 S/cm. Such electrolytes are also relevant for development of protection layers in wet electrolyte-based Lithium ion batteries, as well as for enabling thin-film planar & 3D solid state batteries with ultrathin electrolyte layers (few 10s of nanometers thick). Other improvements aimed at stabilizing the solid-electrolyte interphase especially in wet Li-ion cells, maximizing ease of manufacturing and battery lifetime, will be part of the discussion as well.