| AVS 65th International Symposium & Exhibition | |
| Thin Films Division | Thursday Sessions |
| Session TF-ThP |
| Session: | Thin Film Poster Session |
| Presenter: | Jung-Hwan In, Korea Photonics Technology Institute, Republic of Korea |
| Authors: | J.H. In, Korea Photonics Technology Institute, Republic of Korea M.W. Seo, Korea Photonics Technology Institute, Republic of Korea H.Y. Jung, Korea Photonics Technology Institute, Republic of Korea S.H. Kim, Korea Photonics Technology Institute, Republic of Korea J.H. Choi, Korea Photonics Technology Institute, Republic of Korea |
| Correspondent: | Click to Email |
Diamond-like carbon (DLC) thin film is used as a durable coating in many applications (e.g. infrared optics, mold core for glass lens, engineering ceramic, cutting tool and sliding part in the engine of vehicle). DLC thin film can be categorized according to hydrogen content and sp3 bonding content [1]. Among several kinds of DLC thin film, an a-C:H thin film containing hydrogen atoms usually has been used for IR optics [2]. In this study, it was shown that tetrahedral amorphous carbon (ta-C) thin film deposited by filtered cathodic vacuum arc (FCVA) source without hydrogen addition can be used as durable coating in far and mid-IR optics. The optical transmittance in infrared and mechanical properties by using nano-indentation were measured in various substrate bias voltage conditions. The optical transmittance and hardness decreased with the substrate bias voltage. The refractive index and extinction coefficient were estimated in 1.2 μm thick ta-C coating on a Si window. The hardness of 1.2 μm thick ta-C coating measured by using nano-indentation was about 50 GPa. In addition, the effect of CH4 gas addition in FCVA source on optical and mechanical properties of DLC coating was investigated. It was thought that a ta-C thin film by FCVA source is appropriate as a durable coating for IR optical materials with especially high elastic modulus (e.g. silicon, germanium).
Acknowledgement
This work was supported by the Industrial Infrastructure Program for Fundamental Technologies (N0001085) which is funded by the Ministry of Trade, Industry & Energy (MOTIE, Korea).
Reference
[1] J. Robertson, Diamond-like amorphous carbon, Mat. Sci. Eng. R, 37 (2002) 129-281.
[2] A. Bubenzer, B. Dischler, G. Brandt, P. Koidl, Role of hard carbon in the field of infrared coating materials, Optical Engineering 23(2) (1984), 153-156