Paper TF-ThP36
Investigation of Synthesis Yield Variation of Single-Walled Carbon Nanotubes inside Horizontal Chemical Vapor Deposition Systems

Thursday, October 25, 2018, 6:00 pm, Room Hall B

Single-walled carbon nanotubes (SWNTs) have been expected to be applied to various fields such as nanoelectronic devices, transparent conducting films, energy devices and sensors due to their outstanding physical and chemical properties. A chemical vapor deposition (CVD) is the most popular method for SWNTs synthesis because of its simplicity on SWNTs synthesis process and easy control of process parameters. In general, most of the synthesis experiments have been performed in the central region of the reactor so far where temperature uniformity is guaranteed.

In this study, we report the result of detail investigation of the SWNTs synthesis yield depending on sample position in a horizontal CVD reactor. Methane and Fe thin films were used as feedstock and catalyst for SWNTs synthesis, respective ly. Ultra high resolution scanning electron microscope (UHR-SEM) was used to confirm the synthesis yield variation of SWNTs along the axial distance of the reactor. The morphology and crystallinity of the synthesized SWNTs were evaluated by atomic force microscope and Raman spectroscopy, respectively. Main result of this study shows that the highest synthesis yield of SWNTs was observed at the rear region of the reactor not the central region at all synthesis conditions. The results of this study are expected to be applicable to the synthesis of various nanomaterials using CVD process.