AVS 65th International Symposium & Exhibition
    Plasma Science and Technology Division Monday Sessions
       Session PS+PB-MoA

Paper PS+PB-MoA3
Ultrathin Metal-Organic Covalent Networks by initiated Plasma Enhanced Chemical Vapor Deposition (iPECVD) for Gas Separation Membranes

Monday, October 22, 2018, 2:00 pm, Room 104A

Session: Plasma and Polymers: 'The Legacy of Riccardo d’Agostino and Beyond’
Presenter: Karen Gleason, MIT
Authors: K.K. Gleason, MIT
M. Wang, MIT
N.D. Boscher, Luxembourg Institute of Science and Technology (LIST), Luxembourg
M.C. Creatore, Eindhoven University of Technology, The Netherlands
A. Perrotta, Eindhoven University of Technology, The Netherlands
K. Heinze, Johannes Gutenberg-Universität, Mainz, Germany
Correspondent: Click to Email

Metal-Organic Covalent Networks (MOCN) were synthesized as ultrathin (<100 nm), defect-free and mechanically flexible layers by initiated Plasma Enhanced Chemical Vapor Deposition (iPECVD). The low substrate temperature used for iCVD allowed use of thermal sensitive porous poly[1-trimethylsilyl)-1-propene] (PTMSP) as a substrate. Uniform layers were grown over 150 nm diameter substrates and did not delaminate upon mechanical deformation. The resulting robust MOCN/PTMSP composite membranes exhibiting outstanding gas separation performance for multiple pairs of gases. Using zinc (II) meso-tetraphenyl porphphyrin (ZnTPP) as the monomer and tert-butyl peroxide as the initiator, film deposition was achieved at low plasma excitation powers. The nearly unchanged intensity of the Soret bands in the UV-vis spectra confirmed the retention of the 18 pi e- conjugation of the monomer units incorporated into the films. The gas selectivity for the separation of H2/CH4 or H2/N2 is small (<3) for either the PTMSP base membrane or for thin films of evaporated ZnTPP. However, the gas selectivity for both H2/CH4 or H2/N2 rises to >500 for the PTMSP/iPECVD ZnTPP composite membrane, exceeding the performance of commercial membranes. Ellipsometric Porosimetry and Density Functional Theory Calculations are consistent with a pore size of ~0.4 nm in the MOCN film. Additionally, iPECVD layers derived from a metal-free porphyrin and from porphyrins containing magnanese (III) and cobalt (III) will be described.