Paper NS-ThP6
Fabrication of Carbon Nanotube-Based Electronic Devices with the Dielectrophoresis Method

Thursday, October 25, 2018, 6:00 pm, Room Hall B

We report the deposition and alignment of semiconducting carbon nanotubes with the alternating electric field-directed dielectrophoresis (DEP) method and the fabrication of carbon nanotube-based electronic devices with the DEP-aligned semiconducting carbon nanotubes (CNTs). Semiconducting carbon nanotubes, which were dispersed ultrasonically in solutions, were deposited and aligned onto a pair of gold electrodes using the dielectrophoresis method. The DEP-aligned tubes were further fabricated into carbon nanotube field-transistors (CNTFETs) and CNTFET-based electronic devices such as CNT-based inverters and ring oscillators using the microfabrication techniques. The aligned carbon nanotubes and fabricated devices were imaged using the scanning electron microscope (SEM), and the electrical properties were measured from the fabricated devices using the semiconductor analyzer. The semiconducting CNTs achieved higher yield in the device fabrication, and the fabricated devices demonstrated excellent electrical properties.