| AVS 65th International Symposium & Exhibition | |
| MEMS and NEMS Group | Wednesday Sessions |
| Session MN+NS+PS-WeM |
| Session: | IoT Session: Multiscale Manufacturing: Enabling Materials and Processes |
| Presenter: | Bernard Legrand, LAAS-CNRS, France |
| Authors: | B. Legrand, LAAS-CNRS, France L. Schwab, LAAS-CNRS, Univ Tououse, France P. Allain, MPQ, CNRS, Univ Paris Diderot, France I. Favero, MPQ, CNRS, Univ Paris Diderot, France M. Faucher, IEMN, CNRS, Univ Lille, France D. Théron, IEMN, CNRS, Univ Lille, France B. Walter, Vmicro SAS, France J.P. Salvetat, CRPP, CNRS, Univ Bordeaux, France S. Hentz, CEA-LETI, France G. Jourdan, CEA-LETI, France |
| Correspondent: | Click to Email |
Scanning probe microscopy has been one of the most important instrumental discoveries during the last quarter of the last century. In particular, atomic force microscopy (AFM) is a cross-disciplinary technique able to provide sample morphology down to the atomic scale. It offers invaluable tools to support the development of nano-sciences, information technologies, micro-nanotechnologies and nano-biology. For more than 20 years, boosting the scan rate of AFM has been an increasingly important challenge of the community. However still today, performing routine and user-friendly AFM experiments at video rate remains unreachable in most cases. The conventional AFM probe based on a micro-sized vibrating cantilever is the major obstacle in terms of bandwidth and resonance frequency.
Following a brief description of the context of the work, the talk will first describe the development of AFM probes based on MEMS devices that make use of ring-shaped microresonators vibrating above 10 MHz. A focus will be dedicated to the electrical detection scheme. Based on capacitive transduction and microwave reflectometry, it achieves a displacement resolution of 10-15m/√Hz, allowing the measurement of the thermomechanical vibration of the MEMS AFM probes in air. Imaging capability obtained on DNA origamis samples at a frame rate greater than 1 image/s will be shown as well as investigation of block copolymer surfaces to elucidate the tip-surface interaction when vibration amplitudes are lower than 100 pm.
In the following, our recent research direction at the convergence of the fields of micro/nanosystems and VLSI optomechanics on silicon chips will be presented. Optomechanical resonators allow indeed overcoming the resolution limitation imposed by usual electromechanical transduction schemes. Here, we will introduce fully optically driven and sensed optomechanical AFM probes which resonance frequency is above 100 MHz and Brownian motion below 10-16m/√Hz, paving the way for high-Speed AFM operation with exquisite resolutions at sub-angstrom vibration amplitudes.