AVS 65th International Symposium & Exhibition
    Extending Additive Manufacturing to the Atomic Scale Focus Topic Wednesday Sessions
       Session AM+MP+NS-WeA

Paper AM+MP+NS-WeA3
Integrated Devices made Using Atomically Precise Advanced Manufacturing

Wednesday, October 24, 2018, 3:00 pm, Room 102B

Session: Atomic Scale Manipulation with SPM
Presenter: Shashank Misra, Sandia National Laboratories
Authors: D. Ward, Sandia National Laboratories
D. Campbell, Sandia National Laboratories
M. Marshall, Sandia National Laboratories
T.-M. Lu, Sandia National Laboratories
L. Tracy, Sandia National Laboratories
L. Maurer, Sandia National Laboratories
A. Baczweski, Sandia National Laboratories
S. Misra, Sandia National Laboratories
Correspondent: Click to Email
Atomically precise advanced manufacturing (APAM) has enjoyed considerable success in demonstrating high profile physics demonstrations, such as the single atom transistor. However, a considerably broader application space would open up if other transistor elements could be integrated with APAM devices, opening the door to high gain and room temperature operation. However, integration is generally limited by the high temperatures required to prepare pristine silicon substrates for APAM, and by the low temperatures at which phosphorus donors diffuse away once placed into silicon once APAM is complete. Here, we describe progress in integrating metal-dielectric surface gates to achieve high gain, and compensation doping to achieve room temperature operation. The Digital Electronics at the Atomic Limit (DEAL) project is supported by Sandia’s Lab Directed Research and Development Program, and was performed in part at the Center for Integrated Nanotechnologies, a U.S. DOE Office of Basic Energy Sciences user facility. Sandia National Laboratories is a multimission laboratory managed and operated by National Technology and Engineering Solutions of Sandia, LLC., a wholly owned subsidiary of Honeywell International, Inc., for the U.S. Department of Energy’s National Nuclear Security Administration under contract DE-NA0003525.