AVS 63rd International Symposium & Exhibition
    Thin Film Friday Sessions

Session TF-FrM
CVD, ALD and Film Characterization

Friday, November 11, 2016, 8:20 am, Room 105A
Moderators: David Adams, Sandia National Laboratories, Halil Akyildiz, North Carolina State University


  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:20am TF-FrM1
Assessing the Role of Temperature and Pressure on the Tungsten ALD Selectivity Window on Si/SiO2 Substrates
Paul Lemaire, G.N. Parsons, North Carolina State University
8:40am TF-FrM2
X-ray Absorption Spectroscopy Study of Nanocomposite Thin Films Grown by Atomic Layer Deposition
Anil Mane, S. Babar, A. Yanguas-Gil, Argonne National Laboratory, A. O'Mahony, Incom, Inc., T. Wu, J.W. Elam, Argonne National Laboratory
9:00am TF-FrM3
A Fundamental Study of Thermal Conductivity in ALD-deposited Amorphous Oxide Thin Films of Varying Density
Brandon Piercy, Georgia Institute of Technology, K.E. Meyer, P.E. Hopkins, University of Virginia, M.D. Losego, Georgia Institute of Technology
9:20am TF-FrM4
The Development of ALD Barrier Layers for Harsh Environment Applications
Ankit Singh, Georgia Institute of Technology, A. Perrotta, Eindhoven University of Technology, Netherlands, S. Graham, Georgia Institute of Technology
9:40am TF-FrM5
Conformal CVD Growth of HfBxCy and HfBxAly Hard Coatings with Low Coefficient of Friction and High Oxidation Resistance
Elham Mohimi, T. Ozkan, S. Babar, Z. Zhang, S. Liu, G.S. Girolami, A.A. Polycarpou, J.R. Abelson, University of Illinois at Urbana Champaign
10:00am TF-FrM6
Chemical Vapor Deposition of Silanes for Surface Modification
Brian Johnson, M.R. Linford, Brigham Young University
10:20am TF-FrM7
Iron CVD from Iron Pentacarbonyl: Growth Inhibition by CO Dissociation and Use of Ammonia to Restore Constant Growth
P. Zhang, E. Mohimi, T. Talukdar, G.S. Girolami, John Abelson, University of Illinois at Urbana Champaign
10:40am TF-FrM8
New Insights on the Structure and Chemistry of the Tin Oxide-emitter Interface in CdTe Solar Cells as revealed by Thermomechanical Cleavage and Electron Spectroscopy
Craig Perkins, C. Beall, J.M. Burst, A. Kanevce, M.O. Reese, T.M. Barnes, National Renewable Energy Laboratory
11:00am TF-FrM9
Defect Tolerance in Methylammonium Lead Triiodide Perovskite
Xerxes Steirer, P. Schulz, G. Teeter, V. Stevanovic, M. Yang, K. Zhu, J.J. Berry, National Renewable Energy Laboratory
11:20am TF-FrM10
Non Uniform Deposition Rate Profile during the Growth of SiO2 Films Deposited by Atmospheric Pressure PECVD
Anna Meshkova, FOM Institute DIFFER, Netherlands, F.M. Elam, S.A. Starostin, FUJIFILM Manufacturing Europe, Netherlands, M.C.M. van de Sanden, H.W. de Vries, FOM Institute DIFFER, Netherlands
11:40am TF-FrM11
X-Ray Diffraction from Pseudomorphic GaAs/In0.3Ga0.7As Superlattice High Electron Mobility Transistor Heterostructures on GaAs (001) Substrates
Fahad Althowibi, J.E. Ayers, University of Connecticut
12:00pm TF-FrM12
Flexible CIGS Nanorod Array Photodetectors
Emad Badradeen, M. Brozak, K.M. Al-Mayalee, F. Keles, T. Karabacak, University of Arkansas at Little Rock