AVS 63rd International Symposium & Exhibition
    MEMS and NEMS Wednesday Sessions

Session MN-WeM
Multiscale Phenomena & Emerging Technologies in Micro- and Nano-Systems

Wednesday, November 9, 2016, 8:00 am, Room 102B
Moderators: Max Zenghui Wang, Case Western Reserve University, Robert Davis, Brigham Young University


  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:00am MN-WeM1 Invited Paper
Designing Microrobots to Interact with the Real World
Sarah Bergbreiter, R. St. Pierre, D. Vogtmann, University of Maryland, College Park, A. Gerratt, Ecole Polytechnique Fédérale de Lausanne (EPFL)
8:40am MN-WeM3
Ferroelectric and Piezoelectric Properties of [100]-textured PZT (52/48) Films Deposited on PbxTiO3 Nano-seed Layered Platinized Silicon
Sushma Kotru, J. Zhong, V. Batra, The University of Alabama
9:00am MN-WeM4
Methodology for Electromechanical Characterization of Resonant Micro Structures Actuated by Acoustic and Fringing Electrostatic Fields
S. Lulinsky, T. Shmilovich, Tel Aviv University, Israel, B.R. Ilic, National Institute of Standards and Technology, Slava Krylov, Tel Aviv University, Israel
9:20am MN-WeM5
Nonlinear Interactions of Micromechanical Cantilevers through Fringing Electrostatic Fields
Christopher Wallin, Center for Nanoscale Science and Technology (CNST), National Institute of Standards and Technology (NIST), and University of Maryland (UMD), D.A. Westly, National Institute of Standards and Technology, Center for Nanoscale Science and Technology, Gaithersburg, MD, S.J. Grutzik, A.T. Zenhnder, R.H. Rand, Cornell University, V. Aksyuk, National Institute of Standards and Technology, Center for Nanoscale Science and Technology, Gaithersburg, MD, S. Krylov, Tel Aviv University, Israel, B.R. Ilic, National Institute of Standards and Technology, Center for Nanoscale Science and Technology, Gaithersburg, MD
9:40am MN-WeM6
Reduction in Frequency Noise through Mode Coupling in a MEMS Oscillator
David Czaplewski, C. Chen, D. Lopez, Argonne National Laboratory, P.M. Polunin, O. Shoshani, S.W. Shaw, M.I. Dykman, Michigan State University
11:00am MN-WeM10
Characterization of MEMS-based, Thin Film Silicon Carbide Diaphragms Using Multimode, Resonance Frequency Analysis
A.C. Barnes, Christian Zorman, Case Western Reserve University
11:20am MN-WeM11
High-resolution, MEMS-based Calorimeter for Quantitative Studies of Superconducting Phase Transitions in Thin Film Samples
Zhu Diao, D. Campanini, A. Rydh, Stockholm University, Sweden
11:40am MN-WeM12
Microelectrode Array of Carbon Nanotube Posts with High Aspect Ratio and Millimeter-length, and Its Electrochemical Response
Guohai Chen, R.R. Vanfleet, R.F. Davis, Brigham Young University