AVS 63rd International Symposium & Exhibition
    Vacuum Technology Tuesday Sessions
       Session VT-TuA

Invited Paper VT-TuA11
Cleaning and Verification Strategies for UCV and UHV Components

Tuesday, November 8, 2016, 5:40 pm, Room 104C

Session: Accelerator and Large Vacuum Systems
Presenter: Michael Flämmich, VACOM, Vakuum Komponenten & Messtechnik GmbH, Germany
Authors: M. Flämmich, VACOM, Vakuum Komponenten & Messtechnik GmbH, Germany
C. Worsch, VACOM Vakuum Komponenten & Messtechnik GmbH, Germany
S. Gottschall, VACOM Vakuum Komponenten & Messtechnik GmbH, Germany
R. Bauer, VACOM Vakuum Komponenten & Messtechnik GmbH, Germany
U. Bergner, VACOM Vakuum Komponenten & Messtechnik GmbH, Germany
Correspondent: Click to Email

The requirement of high quality vacuum components for ultra clean vacuum (UCV) and ultra high vacuum (UHV) has become stronger over the last years, especially driven by industrial applications, research institutions and accelerator facilities. Besides the prerequisite of ultra clean surfaces, the outgassing properties from the bulk material are critical for in-situ baked UHV systems. For these applications stainless steel has been and still is the most commonly used raw material. The challenge of suppressing hydrogen outgassing from the bulk material has extensively been discussed in the past. Some approaches seem to be promising, but at the same time they are quite expensive and economically hardly viable. As an alternative to stainless steel, aluminum is regarded as a promising raw material due to some fundamental advantages, even though metal sealed CF components and chambers made from aluminum are hardly available and rarely used.

The present talk focusses on vacuum components and chambers for UCV and UHV applications made from both raw materials, stainless steel and aluminum. In this context, a viable cleaning strategy applying some state-of-the-art cleaning methods will be presented. In order to carefully characterize the extremely low outgassing of components for these vacuum sectors (UCV: non baked; UHV: in-situ baked), appropriate setups for outgassing rate measurements (throughput, accumulation, and pressure rise) will be discussed and respective experimental data will be shown. Measuring, verifying, controlling, and, at the end, knowing the outgassing rate of the produced components enables to explicitly specify, classify and guarantee the cleanliness and outgassing properties of UCV & UHV vacuum components.

As a further focus of the talk, metal-sealed CF vacuum components made from aluminium are introduced. In this context, adequate knife edge stability, complicated weldability and reliable outgassing properties have always been discussed as major challenges. It will be shown that these challenges have been solved lately and that Alu-CF components and chambers (AluVaC®) are today a serious alternative to the established components made from stainless steel.