AVS 63rd International Symposium & Exhibition
    Manufacturing Science and Technology Tuesday Sessions
       Session MS-TuA

Paper MS-TuA1
Southeastern Nanotechnology Infrastructure Corridor (SENIC) – A Nano Fabrication and Characterization Resource as part of the National Nanotechnology Coordinated Infrastructure (NNCI)

Tuesday, November 8, 2016, 2:20 pm, Room 103A

Session: Working with National Labs and User Facilities
Presenter: Paul Joseph, Georgia Institute of Technology
Authors: P. Joseph, Georgia Institute of Technology
D. Gottfried, Georgia Institute of Technology
G. Spinner, Georgia Institute of Technology
O. Brand, Georgia Institute of Technology
Correspondent: Click to Email

The Southeastern Nanotechnology Infrastructure Corridor (SENIC) is a partnership between two state-of-the-art nanofabrication and characterization facilities located at the Institute for Electronics and Nanotechnology (IEN), an interdisciplinary research institute at the Georgia Institute of Technology, and the Joint School of Nanoscience and Nanoengineering (JSNN), an academic collaboration between North Carolina A&T State University (NCA&T) and the University of North Carolina at Greensboro (UNCG). SENIC is one of 16 members of the National Nanotechnology Coordinated Infrastructure (NNCI), supported by the National Science Foundation, and coordinated by the NNCI Coordinating Office at Georgia Tech. NNCI is an integrated networked partnership of academic nanotechnology user facilities across the US, serving the needs of nanoscale science, engineering, and technology. The NNCI is a research facilitator, providing state-of-the-art equipment, staff expertise, and training to nanotechnology researchers. The shared-user, fee-based laboratories are open to academic, industry, and government clientele, offering a unique and comprehensive nanotechnology laboratory and teaming environment.

At Georgia Tech, the IEN has dedicated expertise and facilities for a broad range of micro and nanofabrication and characterization projects, including a focus on applications to bioengineering and biomedicine. IEN supports cleanroom and characterization facilities used by more than 700 researchers annually, with 20% from external institutions. The external users (off-campus users) can access the desired tool set after training (on-site work) or can send their samples for processing or analysis by IEN staff (remote work). IEN offers unique capabilities in e-beam lithography, photolithography, soft lithography, thin film deposition, etch processing, metallization, packaging, micro scale printing, imaging, metrology, and microanalysis. IEN-supported research themes include nanostructures, nanoelectronics, bio-MEMS, biological/chemical sensors and systems, biomaterials, photonics, materials growth and synthesis.

During this presentation, an overview of NNCI and SENIC will be given. Subsequently, we will discuss shared user lab resources, external user services, and education programs available at IEN.