| AVS 63rd International Symposium & Exhibition | |
| MEMS and NEMS | Friday Sessions |
| Session MN+MS-FrM |
| Session: | Radiation Effect in Emerging Micro/Nano Structures, Devices, and Systems |
| Presenter: | Michael Alles, Vanderbilt University |
| Authors: | M.L. Alles, Vanderbilt University K.I. Bolotin, Vanderbilt University A. Zettl, University of California at Berkeley B. Homeijer, Sandia National Laboratories J.L. Davidson, Vanderbilt University R.D. Schrimpf, Vanderbilt University R.A. Reed, Vanderbilt University R.A. Weller, Vanderbilt University D.M. Fleetwood, Vanderbilt University W. Liao, Vanderbilt University R.J. Nicholl, Vanderbilt University |
| Correspondent: | Click to Email |
The dramatic reduction in size and power consumption offered by micro- and nano-scale electromechanical systems (M&NEMS) offer compelling advantages for adoption in many areas, including space and military systems. Mission reliability and survivability of next-generation space-borne systems depends critically upon a detailed understanding of the radiation response and reliability of the constituent devices when exposed to the relevant radiation environment. M&NEMS may be employed for a variety of sensor and actuation applications, oscillators, and have potential to be incorporated as high-reliability solid-state (logic) switches.
While there has been considerable study of radiation effects on some of the common materials (single and poly crystalline silicon, and silicon-dioxide), the study in the context of MEMS has been more limited, and mainly experimental. The general indication is that depending on the operating principal, MEMS can be sensitive to radiation-induced charging of insulators, and to displacement damage at very high exposure doses of energetic particles.
More recently, fabrication process, namely the ability to create nano-scale structures, and the introduction of new materials (esp. 2D and CNTs), have expanded the opportunities for M&NEMS. The Defense Threat Reduction Agency (DTRA) has recently initiated multiple projects in the study of various aspects and configurations of M&NEMS. This talk will discuss a specific project which seeks to advance the understanding of the effect of radiation on the relevant electro-mechanical properties of the constituent materials and structures, focusing on 2D materials and CNTS, and the implications for space and military applications.
The key question for this work is: How does radiation damage to constituent materials impact the mechanical and electrical basis of operation of M&NEM structures? In particular, cumulative damage by non-ionizing energy loss can, in principle, alter the mechanical properties of structures such as cantilever’s and 2D membranes, and surface effects and trapped charge in insulators can impact electrical operating conditions. Presently, the extent to which such effects impact the operation of advanced M&NEM devices is unclear. This particular project combines expertise and experience in materials science, M&NEMS, and radiation effects of the University of California at Berkeley, Sandia National Laboratories, and Vanderbilt University to conduct a systematic study of the impact of relevant radiation types on the key operating properties of novel M&NEM structures, and to capture observed effects in finite element models.