| AVS 63rd International Symposium & Exhibition | |
| Advanced Ion Microscopy Focus Topic | Wednesday Sessions |
| Session HI-WeA |
| Session: | 10 Years of GFIS Microscopy |
| Presenter: | John A. Notte, Carl Zeiss Microscopy, LLC |
| Correspondent: | Click to Email |
Since the commercial introduction of the Gas Field Ion Source in 2006, there has been a steady progression in both the GFIS technology and the GFIS applications. The majority of the technological developments were motivated by the goal of making the helium beam more stable and more versatile. This includes improvements to the high voltage stability, cryogenic system, the gun vacuum, and gas purity. Other changes were adopted to simplify the installation process and make the facilities requirements less demanding. Other efforts made the instrument more compatible and consistent with the larger family of Zeiss instruments.
Simultaneously, there have been changes to the GFIS applications, largely driven by insightful customers wanting to exploit this unique beam. This gradual change is reflected in the marketing literature which promoted the original instrument as a microscope (e.g. the “ORION Helium Ion Microscope”), whereas we now emphasize the descendent product as an instrument for nanofabrication (e.g. the “ORION NanoFab”). The new applications include lithography, nanoscale milling, structural modification, beam induced chemistry, transmission imaging, and various analytical methods. The latest NanoFab includes automated scripting, to allow for mass production and parametric investigations.
In support of these new applications, there is a desire to operate the GFIS with gas species other than helium to produce, for example a focused neon beam. The operation of the GFIS with neon introduces challenges not present with helium. And many of the newest developments of the GFIS are aimed towards making the neon operation more reliable. The changes include improvements to the base vacuum, column, the gas manifold, and gas purity. Other changes are operational, helping to define the circumstances where neon can operate most successfully.
This talk will review the evolution of the ORION product family over the last 10 years. Special attention will be given to the most recent efforts undertaken to produce a stable neon ion beam.