| AVS 63rd International Symposium & Exhibition | |
| Advanced Ion Microscopy Focus Topic | Thursday Sessions |
| Session HI+NS-ThM |
| Session: | Fundamentals of Ion Beam Microscopy |
| Presenter: | Olga Ovchinnikova, Oak Ridge National Laboratory |
| Authors: | A. Ievlev, Oak Ridge National Laboratory V. Iberi, Oak Ridge National Laboratory J. Jakowski, Oak Ridge National Laboratory M.J. Burch, Oak Ridge National Laboratory H. Hysmith, Oak Ridge National Laboratory A. Belianinov, Oak Ridge National Laboratory R.R. Unocic, Oak Ridge National Laboratory O.S. Ovchinnikova, Oak Ridge National Laboratory |
| Correspondent: | Click to Email |
In-situ direct writing by ion beams from solutions opens a pathway for resistless fabrication of nanostructures with higher purity than standard gas phase deposition approaches like IBID. In particular the use of the helium ions with the opposite charge and shorter mean free path offers the potential for the localization of the reaction zone on the single digit nanometer scale. However, to fully control the interaction of the ion beam with the liquid to allow for single digit fabrication a comprehensive understanding of the radiolytic process as well as role of secondary iSE generated in solution has to be developed. Here we will present our results on the visualizing nanoparticle nucleation and growth parameters through data analytics on acquired in-situ growth movies and correlate these results to a fully encompassing time-dependent quantum dynamical simulation that takes into account both quantum and classical interactions. Additionally, with optimized instrument parameters and solution chemistry we are able to demonstrate writing of platinum structures from liquid (beam induced electroplating) in a platinum chloride solution using helium ions with sub-10 nm resolution. Furthermore, we will discuss opportunities for using in situ flow cell technology for understating of diffusion processes as they relate to direct writing with ions in solution.
Acknowledgements
This work was conducted at the Center for Nanophase Materials Sciences, which is a Department of Energy (DOE) Office of Science User Facility