AVS 63rd International Symposium & Exhibition
    Exhibitor Technology Spotlight Wednesday Sessions
       Session EW-WeL

Paper EW-WeL6
Ampoules and Bubblers 101

Wednesday, November 9, 2016, 2:00 pm, Room Hall C

Session: Exhibitor Technology Spotlight Session
Presenter: William Kimmerle, NSI
Authors: W. Kimmerle, NSI
K.S. Kimmerle, NSI
Correspondent: Click to Email
NSI Bubblers and Ampoules are commonly used in Atomic Layer Deposition, Chemical Vapor Deposition, Epitaxial growth on crystalline substrates and numerous other applications. The drive for smaller structures continues to demand new materials and molecules as well as methods for depositing these new materials. Bubblers and ampoules provide a means of safely transporting and precisely delivering these new molecules to wafer substrates. Additionally, as higher vapor pressure materials are utilized, temperature control and ampoule content monitoring become salient. A discussion of safety (Code of Federal Regulations - DOT 4B), various types of ampoules and bubblers for use with liquids and or solids at increasingly higher temperatures will be discussed. NSI – is the largest premium quality manufacturer of Ampoules and Bubblers for use in ALD, CVD, Compound Semi and Epi in the world.