| AVS 63rd International Symposium & Exhibition | |
| Electronic Materials and Photonics | Tuesday Sessions |
| Session EM+MI+MN-TuA |
| Session: | New Materials and Devices for Emerging Memory Technologies |
| Presenter: | Bart Van Schravendijk, Lam Research |
| Correspondent: | Click to Email |
The rapid scaling of semiconductor memory is radically changing the memory industry. Flash memory has switched from lateral scaling to vertical scaling while other new memory technologies are aggressively vying for new opportunities in the memory market. Their targets range from niche applications to replacing any one of the three big memory technologies : SRAM, DRAM or Flash.
For vertical NAND flash largely conventional materials are used in its fabrication at present. However, the unabated drive for higher density is driving agressive vertical scaling, which poses new problems for stack design and processing. This drives improvements and maybe even changes in the materials.
Newer memory technologies, such as STT-RAM, ReRAM and PCRAM, bring with them different challenges to the processing arena. These new memories come with materials whose full scope of interactions with semiconductor processing are still poorly understood. These materials provide new challenges for the processing tools when scaling these memory technologies to dimensions that are economically attractive.
In this talk we will review some of the more challenging problems for advanced memories and some potential solutions.