| AVS 63rd International Symposium & Exhibition | |
| Applied Surface Science | Tuesday Sessions |
| Session AS-TuP |
| Session: | Applied Surface Science Division Poster Session |
| Presenter: | James Lallo, Thermo Fisher Scientific |
| Authors: | J. Lallo, Thermo Fisher Scientific C. Deeks, Thermo Fisher Scientific, UK P. Mack, Thermo Fisher Scientific, UK T.S. Nunney, Thermo Fisher Scientific, UK J.P.W. Treacy, Thermo Fisher Scientific, UK |
| Correspondent: | Click to Email |
Multitechnique analysis is becoming increasingly common for characterisation of materials. Performing X-ray Photoelectron Spectroscopy (XPS) is now routine in many laboratories to give surface information (0-10 nm). Energy Dispersive X-ray Spectroscopy (EDS or EDX) is also widely used in laboratories to help detect elemental information from smaller areas within the bulk (1-2 µm) of the material. A combination of both EDS and XPS can help to give a wider picture of samples being analysed, giving both elemental and chemical information from both the ‘surface’ and the ‘bulk’ of samples over a wide ranging spatial area.
EDS is often used in microelectronics laboratories to observe if any contaminants are present on the surface. A big contaminant is copper as it has poor adhesion to most insulators, so the ability to observe this is key. We will demonstrate on advanced microelectronic samples that EDS alone is not enough for detecting contaminants such as this, and we will show that XPS is also needed to give the full elemental and chemical details of these types of samples.
This presentation will look at a range of microelectronics samples, and demonstrate by using both XPS and EDS combined on a single system, that no one technique is enough to obtain the full picture of what is in the sample, and show that by having the ability to have both these techniques on a single system, it can provide a wealth of complementary information from the surface and near-surface regions of a material.